Cathodoluminescence

Characterisation Installation 4

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The cathodoluminescence tool is a SEM with a FEG source (3-10 keV) allowing spatial resolution as low as 3 nm. Samples are mounted on a 1 inch sample holder attached on a piezoelectric nano-positioning cryostage allowing low temperature measurements (~10K). An intra-column optical collection system coupled with a dispersive spectrometer and two array detectors permits the spectral analysis of luminescence emission from 200 nm to 1.6 µm. This system offers a way to extract spatially resolved electronic and/or optical properties of luminescent material and devices.

provided at NFFA-Europe laboratories by:

CEA-LETI

France

CEA-LETI

France

Cathodoluminescence

Applications

Helium to room temperature luminescence characterization of solid samples

Analysis of material properties (charge carrier recombination, electronic transition) and detection of defects or impurities

Source

Electron gun with a beam current varying from 100pA to 20nA, focused on the sample thanks to a SEM microscope

Range

Electron gun of energy between 2 and 10keV

Detection

Visible CCD detector: 220 -1050 nm

Near infrared InGaAs array: 800 -1550 nm

Resolution

Luminescence spatial resolution from 30nm to several hundreds of nanometers depending on electron beam energy and probed material

SEM resolution is few nanometers

Scanning Or Positioning

XY mapping stage range: 25mmx25mm, XY mapping stage resolution<100nm

Z range: 5mm

Sample

From few mm² to 20 mm diameter flat samples

Enviroment

Secondary vacuum ambient in the chamber

Helium cryostat from 4 K to 500 K

Other Capabilities

Cross section view is possible, in this case sample size is limited to 2mmx2mm

Sample preparation allowed: cleaving or polishing only

No FIB etching (detrimental for luminescence characteristics of a lot of materials)